JPH082592Y2 - マイクロシステムガスセンサ - Google Patents
マイクロシステムガスセンサInfo
- Publication number
- JPH082592Y2 JPH082592Y2 JP1988140411U JP14041188U JPH082592Y2 JP H082592 Y2 JPH082592 Y2 JP H082592Y2 JP 1988140411 U JP1988140411 U JP 1988140411U JP 14041188 U JP14041188 U JP 14041188U JP H082592 Y2 JPH082592 Y2 JP H082592Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- hole
- gas sensor
- diaphragm
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 54
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 43
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 3
- 239000005297 pyrex Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988140411U JPH082592Y2 (ja) | 1988-10-27 | 1988-10-27 | マイクロシステムガスセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988140411U JPH082592Y2 (ja) | 1988-10-27 | 1988-10-27 | マイクロシステムガスセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0260863U JPH0260863U (en]) | 1990-05-07 |
| JPH082592Y2 true JPH082592Y2 (ja) | 1996-01-29 |
Family
ID=31404554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988140411U Expired - Lifetime JPH082592Y2 (ja) | 1988-10-27 | 1988-10-27 | マイクロシステムガスセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH082592Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5212286B2 (ja) * | 2009-07-09 | 2013-06-19 | 富士電機株式会社 | 薄膜ガスセンサおよび薄膜ガスセンサの製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2619003B2 (ja) * | 1988-08-05 | 1997-06-11 | 株式会社東芝 | 酸素検出素子及びその製造方法 |
-
1988
- 1988-10-27 JP JP1988140411U patent/JPH082592Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0260863U (en]) | 1990-05-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA2350076C (en) | Electrostatically actuated pumping array | |
| US6126140A (en) | Monolithic bi-directional microvalve with enclosed drive electric field | |
| US20040000843A1 (en) | Piezoelectric actuator and pump using same | |
| EP0389071B1 (en) | Method for fabricating semiconductor diaphragms | |
| EP1289658B1 (en) | Valve for use in microfluidic structures | |
| US6626417B2 (en) | Microfluidic valve and microactuator for a microvalve | |
| DK2556282T3 (en) | Microvalve with valve elastically deformable lip, the preparation method and micropump | |
| EP0469749A1 (en) | Control valve utilizing mechanical beam buckling | |
| US5538221A (en) | Micromechanical valve for micromechanical dosing devices | |
| US20030045019A1 (en) | Method of fabrication of a micro-channel based integrated sensor for chemical and biological materials | |
| JPH05502079A (ja) | 静電動作可能な超小形ポンプ | |
| KR910012538A (ko) | 마이크로 펌프 및 그 제조 방법 | |
| JPH03505771A (ja) | 一定の吐出量を有する小型ポンプ | |
| JPH04501303A (ja) | マイクロ弁の製法 | |
| US6007046A (en) | Fluid transport circuit and valve structure therefor | |
| JPH08277960A (ja) | バルブ | |
| JP2000510548A (ja) | 微薄膜ポンプ本体の製造方法 | |
| US20080296523A1 (en) | Low-power piezoelectric micro-machined valve | |
| US4188977A (en) | Fluid system circuit board | |
| JPH082592Y2 (ja) | マイクロシステムガスセンサ | |
| US4110140A (en) | Method of making fluid system circuit board | |
| WO2021176931A1 (ja) | ガス測定器 | |
| JP2912372B2 (ja) | 液体マイクロバルブ | |
| JP3020488B2 (ja) | 液体マイクロポンプ | |
| Thuillier et al. | Development of a low cost hybrid Si/PDMS multi-layered pneumatic microvalve |